About

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History

2014
  • Micron Memory Japan
  • SEN Implanter 2 tools de-installaion
  • NISSIN Implanter 2 tools de-installaion
  • TEL ALFA-303i 7 tools de-installaion and relocation
  • DNS WET 3 Tools de-installaion
  • EBARA CMP 4 Tools de-installaion
  • AMAT DRY Etch 2 tools de-installaion
  • TEL DRY Etch 4 tools de-installaion
  • LAM DRY Etch 2 tools de-installaion
2015
  • Established Private Company (SP)
  • MMJ TEL&KE Diffusion De-install & Relocation
  • Refurbished 300mm TEL Diffusion tool for SK-HYNIX
2016
  • MMJ TEL Diffusion FML Heater Overhaul (Device Yield up)
  • MMJ TEL Diffusion Tool De-installation
  • MMJ TEL Diffusion Tool Heater Exchange
  • MMJ TEL Diffusion Heater Cover provided
2017
  • MMJ TEL Diffusion FML Heater Overhaul
  • MMJ TEL Diffusion S/C PM Training by TEL Japan
  • SEC Relocation (TEL diffusion 20 tools)
  • MMJ TEL Diffusion Tool De-Installation
  • MMS TEL Diffusion Tool PM & Maintenance
  • LAM Dry Etch Tool De-installation MMJ
  • EBARA CMP 3 Tools De-installation MMJ
2018
  • SEN Implanter Tool De-installation MMJ
  • TEL INDY PLUS 10 tools Pyong Tack Relocation
  • TEL&KE BIP(N2 purge) 70tools Modification
  • TEL INDY PLUS POLY 10 Tools Modification
  • TEL INDY PLUS 20 tools de-installaion
2019
  • ISO9001 & ISO45001
  • Venture Comapany Certification
  • SP SEMICON JAPAN LTD
2020
  • Parts Repair Partnership Contract
    (Diffusion, Dry Etch, CVD, PVD, Implant)
2021
  • SEC LED Tools Maintenance
  • S/C Tool Patent (domestic, International)
  • Graphite Main Disk Evaluation in SEC
  • TEL Track Parts
  • TEL Furnace tools, KE Tools Parts Repair & Parts Supply
       :  Supply Parts : N2 Purge (BIP) Parts, Quartz, Driver,
            Heating Jacket, pipe, etc
       :  Repair : Z axis Overhaul,  Loader Arm Overhaul
  • AMAT, LAM, TEL (Dry Etch, CVD, PVD
       :  Heater, Robot, Edge Ring, Driver, RPS, ESC etc  
  • Developing a fully automatic S/C tool