Maintenance (Diffusion, Implant, Dry Ecth, CVD, Photo etc)

• TEL & KE
• AMAT Varian, SEN, NISSIN
• TEL & AMAT & LAM
• TEL & AMAT & LAM
• ASML

Modification

Refurbish

Heater Repair & Set up

• VMM Series
• VMU Series
• FTP Series
• FTP Series
• TORCH Heater, Burn out Heater
• VERTICAL Series

Parts Supply, Overhaul, Repair

Used Equipment deal

Cost Reduction Items